Lab-on-CMOS Resonant Micro-Calorimeter

Abstract

[eng] Micro-calorimetry targeting sub-nanowatt resolution is fundamental for high-resolution thermal applications in the biological and chemical domains. Also, CMOS compatibility is crucial for system-on-chip devices in line with current technological trends, as well as point-of-care portability, low-cost batch production, ease of fabrication, and miniaturization represent significant strengths. However, compatibilization issues like size disparity, bonding strength, lack of standardization and electricalfluidic ports mixture, faced when integrating a CMOS die within a microfluidics platform represent major challenges up to date. In this work, we demonstrate a Lab-on-CMOS micro-calorimeter combining a CMOS-MEMS 4-MHz CC-Beam as resonant temperature sensing element and a PDMS-based microfluidics platform for micro-channel routing to achieve sub-mK temperature resolution and ultra-fast response in a 500-pL reaction chamber.